Thin-film metrology instrument uses two UV spectrometers

    Feb. 3, 2022
    The kSA ACE thin-film metrology instrument provides in situ monitoring of the flux and growth rate of atomic species.
    K Space Associates 61f1b0f4a6652

    The kSA ACE (Atomic Control for Epitaxy) thin-film metrology instrument provides in situ monitoring of the flux and growth rate of atomic species, using atomic absorption spectroscopy. It uses two UV-optimized solid-state spectrometers and is suited for applications in the fabrication of III-IV and II-V compounds, semiconductor devices, thin film sensors, solar cells, optical coatings, and x-ray optics.

    k-space Associates

    Dexter, MI

    k-space.com

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