Thin-film metrology instrument uses two UV spectrometers

Feb. 3, 2022
The kSA ACE thin-film metrology instrument provides in situ monitoring of the flux and growth rate of atomic species.

The kSA ACE (Atomic Control for Epitaxy) thin-film metrology instrument provides in situ monitoring of the flux and growth rate of atomic species, using atomic absorption spectroscopy. It uses two UV-optimized solid-state spectrometers and is suited for applications in the fabrication of III-IV and II-V compounds, semiconductor devices, thin film sensors, solar cells, optical coatings, and x-ray optics.

k-space Associates

Dexter, MI

k-space.com

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