Thin-film metrology instrument uses two UV spectrometers
The kSA ACE (Atomic Control for Epitaxy) thin-film metrology instrument provides in situ monitoring of the flux and growth rate of atomic species, using atomic absorption spectroscopy. It uses two UV-optimized solid-state spectrometers and is suited for applications in the fabrication of III-IV and II-V compounds, semiconductor devices, thin film sensors, solar cells, optical coatings, and x-ray optics.
k-space Associates
Dexter, MI