Nikon Metrology radar inspection system uses heterodyne interferometry
The APDIS Laser Radar automated, non-contact metrology system uses a focused laser beam and heterodyne interferometry to measure range accurately. It provides complex measurement of objects from a long stand-off distance. Typical length measurement accuracies for the four models range from 28 μm at 2 m to 313 μm at 30 m.
Nikon Metrology
Leuven, Belgium