Sensofar large-area metrology system features submicron height repeatability
The S Wide large-area metrology system measures sample areas up to 300 × 300 mm. Features include single-button acquisition, submicron height repeatability, one-shot height measurement up to 40 mm without Z scanning, and bi-telecentric lenses with low field distortion. Systems are calibrated to ISO 25178 and VDI 2634-2 standards.
Sensofar
Terrassa, Spain
www.sensofar.com