The SD1024FLTM spectrograph offers RoHS compliance and improved line-shape uniformity, resolution, and noise equivalent power over its predecessor, as well as a second-order blocking addition. SpectraView application software enables endpoint detection and process control, and tool integration is possible using RS-232, Ethernet, and digital I/0.
New General Purpose Spectrograph
February 4, 2010- Verity Instruments is pleased to announce the release of the new General Purpose Spectrograph, the SD1024FLTM. Compared to the model it is replacing, the SD1024DLTM, the RoHS compliant SD1024FL offers several improvements including better line shape uniformity, improved resolution, improved noise equivalent power and the addition of 2nd order blocking.
The SD1024FL is used with Verity's SpectraViewTM application software, which is based upon the company's 29 years of experience in endpoint detection and process control. Tool integration is possible using RS232, Ethernet, and Digital I/0.
Verity Instruments, Inc. is a leading supplier of advanced instrumentation and software for optical endpoint determination as required in etch, CVD etchback, photoresist strip, CMP endpoint and related applications. Additional products include instruments for film thickness measurement. Verity has been providing optical instruments for semiconductor processing since 1980. Additional information about the company and products can be found on Verity’s website at http://www.verityinst.com or by phone at (972) 446-9990.
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