Thin-film software

FilmSpectrum is a program that analyzes and characterizes thin films based on spectrophotometric data. The program allows simultaneous solution of index of refraction, extinction coefficient, and film thickness. The program can provide automated data acquisition from several spectrophotometer models, as well as providing tools for customizing the acquisition to unsupported instruments. Both single and multilayer films can be characterized, including SOI, SOS, SiNx, SiOx, DLC, SOG, photo resist,

Thin-film software

FilmSpectrum is a program that analyzes and characterizes thin films based on spectrophotometric data. The program allows simultaneous solution of index of refraction, extinction coefficient, and film thickness. The program can provide automated data acquisition from several spectrophotometer models, as well as providing tools for customizing the acquisition to unsupported instruments. Both single and multilayer films can be characterized, including SOI, SOS, SiNx, SiOx, DLC, SOG, photo resist, amorphous-silicon, amorphous hydrogenated carbon, polysilicon, ITO, and antireflective films.

Scientific Computing International, Encinitas, CA

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