ALIO Industries motion control hexapod achieves six-degree-of-freedom positioning
The Hybrid Hexapod combines a precision x-y monolithic stage, tripod, and continuous rotation theta-z axis to achieve six-degree-of-freedom positioning. It has <100 nm 3D six-axis repeatability for use in laser processing, optical inspection, photonics, semiconductor, metrology, and medical device applications, as well as any micromachining projects.
ALIO Industries
Arvada, CO