Single-axis piezo stages from PI provide resolution of less than 0.1 nm

Feb. 2, 2017
The PiHera P-620.1–P-629.1 piezo flexure nanopositioning stages feature X-Y travel to 1800 μm.

The PiHera P-620.1–P-629.1 piezo flexure nanopositioning stages feature X-Y travel to 1800 μm. The closed-loop, single-axis stages have absolute-measuring direct-metrology capacitance sensors, and provide resolution of <0.1 nm with positioning accuracy of 0.02%. They are driven by the company’s PICMA piezo ceramic actuators.
PI (Physik Instrumente)
Auburn, MA

www.pi-usa.us

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