Micromanipulators from Prior Scientific have a 20 mm range with 5 nm resolution
The uM series micromanipulators from Sensapex are configurable in the field, and have unlimited scalability. They are based on zero-drift solid-state drives with integrated closed-loop control. They have a 20 mm range with 5 nm resolution and 100 nm repeatability, with virtual and physical fourth-axis options.
Prior Scientific
Rockland, MA