Active vibration cancellation platform is designed for SEMs

June 5, 2009
Technical Manufacturing Corporation is introducing the STACIS FP active vibration-cancellation floor platform system designed for use with scanning-electron microscopes (SEMs). The platform features sub-Hz vibration cancellation in an active hard-mount floor platform that fits most commercial SEMs. The platform is compatible with all internal SEM vibration-isolation systems.

Technical Manufacturing Corporation is introducing the STACIS FP active vibration-cancellation floor platform system designed for use with scanning-electron microscopes (SEMs). The platform features sub-Hz vibration cancellation in an active hard-mount floor platform that fits most commercial SEMs. The platform is compatible with all internal SEM vibration-isolation systems. With vibration cancellation starting below 1 Hz, it features extended stroke piezoelectric actuators and damped, powder-coated steel plates that sandwich four isolators and TMC's DC 2000 digital controller. The system is only 7 in. tall, measures 34 x 40 in., weighs less than 400 pounds, and can support 2500 lb or more with no soft air suspension. It is available with three or six degrees of freedom.
Technical Manufacturing Corporation
Peabody, MA
www.techmfg.com

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