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    Aerotech's linear motor stages for use in semiconductor and LED wafer scribing

    Jan. 7, 2014
    The planar DL-200XY and -300XY stages are available in nine travel and performance configurations.
    LFW Staff
    Content Dam Lfw En Articles 2014 01 Aerotechs Linear Motor Stages For Use In Semiconductor And Led Wafer Scribing Leftcolumn Article Thumbnailimage File

    Planar DL-200XY and -300XY stages are available in nine travel and performance configurations for use in such applications as ranging from surface profilometry to high-speed semiconductor and LED wafer scribing. They use non-contract, direct-drive technology to achieve velocities of 1 m/s and accelerations 1.5 g, and include anti-creep roller bearings.
    Aerotech
    Boxford, MA
    www.aerotech.com

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    LFW Staff

    Published since 1965, Laser Focus World—a brand and monthly magazine for engineers, researchers, scientists, and technical professionals—provides comprehensive global coverage of optoelectronic technologies, applications, and markets. With 80,000+ qualified print subscribers in print and over a half-million annual visitors to our online content, we are the go-to source to access decision makers and stay in-the-know.

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