Aerotech's linear motor stages for use in semiconductor and LED wafer scribing

The planar DL-200XY and -300XY stages are available in nine travel and performance configurations.
Jan. 7, 2014
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Planar DL-200XY and -300XY stages are available in nine travel and performance configurations for use in such applications as ranging from surface profilometry to high-speed semiconductor and LED wafer scribing. They use non-contract, direct-drive technology to achieve velocities of 1 m/s and accelerations 1.5 g, and include anti-creep roller bearings.
Aerotech
Boxford, MA
www.aerotech.com

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