• Aerotech's linear motor stages for use in semiconductor and LED wafer scribing

    The planar DL-200XY and -300XY stages are available in nine travel and performance configurations.
    Jan. 7, 2014
    Content Dam Lfw En Articles 2014 01 Aerotechs Linear Motor Stages For Use In Semiconductor And Led Wafer Scribing Leftcolumn Article Thumbnailimage File

    Planar DL-200XY and -300XY stages are available in nine travel and performance configurations for use in such applications as ranging from surface profilometry to high-speed semiconductor and LED wafer scribing. They use non-contract, direct-drive technology to achieve velocities of 1 m/s and accelerations 1.5 g, and include anti-creep roller bearings.
    Aerotech
    Boxford, MA
    www.aerotech.com

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