Linear motor stages from Newport deliver minimum incremental motion of 1 nm

April 30, 2013
The XM-Series linear stages now have minimum incremental motion of 1 nm for nanopositioning applications such as laser machining, semiconductor wafer processing, sensor test and calibration, and ultraprecise assembly.
Newport XM-Series linear stages
Newport XM-Series linear stages

The XM-Series linear stages now have minimum incremental motion of 1 nm for nanopositioning applications such as laser machining, semiconductor wafer processing, sensor test and calibration, and ultraprecise assembly. A frictionless direct-drive linear motor eliminates backlash, hysteresis, windup, and stiction, while an ironless motor coil ensures no cogging. A glass scale encoder provides position feedback with 80 nm bidirectional repeatability.
Newport (MKS Instruments)
Irvine, CA



Newport Improves XM-Series Linear Motor Stages with Minimum Incremental Motion of 1 nm

Irvine, CA - Newport Corporation, a worldwide leader in photonic solutions, improves its XM-Series linear stages to a minimum incremental motion of 1 nm. The high performance linear stages deliver excellent dynamic performance with consistent and reliable motion for nanopositioning applications such as laser machining, semiconductor wafer processing, sensor test and calibration, and ultra-precision assembly.

"The key to the improved performance of Newport's industry-leading linear motor stages is an optimized driver design with the XPS-DRV02L Drive Module," says Beda Espinoza, Sr. Manager Product Marketing Motion at Newport. "XM-stages are well-known to provide robust, repeatable motion with outstanding accuracy and dynamic performance. Now, with minimum incremental motion of 1 nm, an already excellent solution just got better. Furthermore, the piezo-level nanopositioning performance is available over long travel ranges."

Newport's XM stages are used across the globe in many demanding nanopositioning applications and feature a center-driven ironless motor. Since the high-efficiency linear motor is a frictionless direct drive device, the motion performance is not limited by backlash, hysteresis, wind-up or stiction. In addition, the ironless motor coil ensures zero cogging for smooth velocity control and high efficiency with minimized heat generation. XM stages rely on matched pairs of ultra-quiet, anti-creep crossed roller bearings for smooth, ripple-free motion and accurate trajectory control.

A high-precision glass scale encoder provides accurate position feedback with 80 nm bi-directional repeatability. The precision alignment and mounting of the low thermal expansion scale in the center of the stage minimizes the impact of temperature changes on stage repeatability and accuracy. The encoder signals are interpolated by Newport's XPS motion controller with sub nm resolution and less than 1 nm noise for outstanding position sensitivity and stability.

All XM-Series stages are machined from stress-relieved 7075 aluminum for long-term strength and stability. All critical stage surfaces undergo multiple machining processes and precision grinding under strict temperature and quality control to guarantee the overall performance and accuracy for which Newport's linear motor stages are known.

For more information on the XM-Series stages, please visit

About Newport Corporation
Newport Corporation is a leading global supplier of advanced-technology products and systems to customers in the scientific research, microelectronics manufacturing, aerospace and defense/security, life and health sciences and precision industrial manufacturing markets. Newport's innovative solutions leverage its expertise in high-power semiconductor, solid-state and ultrafast lasers, photonics instrumentation, sub-micron positioning systems, vibration isolation, optical subsystems and precision automation to enhance the capabilities and productivity of its customers' manufacturing, engineering and research applications. Newport is part of the Standard & Poor's SmallCap 600 Index and the Russell 2000 Index.


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