Irvine, CA, May 21, 2003. Newport's RGV100 Direct-Drive Motorized Rotation Stage brings higher speeds, greater reliability, and higher precision, plus an ultra-low profile to semiconductor wafer inspection and related applications. The direct-drive technology eliminates the worm gear of traditional rotation stages, providing faster rotating speeds, superior reliability, and enhanced position sensitivity to applications that include precision metrology, semiconductor wafer inspection, micro-robotics, MEMS, and more.
The RGV100 is the lowest profile direct-drive rotation stage available; only 49 mm in height. A large 50 mm diameter through-hole allows convenient routing of cables and vacuum lines through the stage, critical for semiconductor applications. The RGV100 features a high efficiency DC torque motor with rare earth magnets. It supplies an optimum ratio of torque per volume for high acceleration rates with minimum stage heating. Compared to brushless motors, DC torque motors allow the use of conventional motion electronics with no additional costs associated with electronic motor commutation.
Precision is ensured by a proprietary, high-resolution glass scale with 18,000 line counts per revolution that directly reads the position of the rotating platform. Resolution is 0.0001 deg.; Uni-directional repeatability is 0.0003 deg.; and accuracy is 0.01 deg., with an average MTBF of 20,000 hours.
The flat encoder is mounted on a precision ground reference surface and is perfectly aligned with the stage's rotation axis to minimize position errors induced by eccentricity, wobble, or axial runout. A once-per revolution index pulse permits precision homing to a unique position.
For more information, visit www.newport.com .
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