DynamYX RS Positioning Stage Delivers High Performance

March 13, 2003
Irvine, CA, March 113, 2003. The DynamYX RS Air-Bearing Positioning Stage from Newport Corporation offers customers an innovative approach to reticle positioning in their next generation semiconductor manufacturing inspection systems. The DynamYX RS is a high performance dual-axis air bearing stage platform that provides a smaller footprint than traditional open-frame architectures, greater flexibility in the optical system design, and easier access to the optical elements

Irvine, CA, March 113, 2003. The DynamYX RS Air-Bearing Positioning Stage from Newport Corporation offers customers an innovative approach to reticle positioning in their next generation semiconductor manufacturing inspection systems. The DynamYX RS is a high performance dual-axis air bearing stage platform that provides a smaller footprint than traditional open-frame architectures, greater flexibility in the optical system design, and easier access to the optical elements for upgrades and routine maintenance.

Due to the isolated location of the stage's composite reticle holder, the DynamYX RS solves the problem of keeping the reticle away from possible sources of particulate generation.

The DynamYX RS is part of five-product family of precision air bearing stages designed for high throughput semiconductor inspection and processing applications. In the application-specific RS configuration, a rigid composite reticle holder is directly attached to the moving XY carriage of the stage. This reticle holder supports and positions the reticle in the large, open area at the front of the stage and incorporates unique static-free vacuum pads, which hold and protect the reticle from dangerous electrical charges.

The granite base is easily customized to accommodate optical fixtures at the front of the system for inspection of the reticle from beneath. Inspection from above is accommodated by an integrated gantry bridge structure. With the reticle and optics located in the front of system, away from any moving stage elements or cables, the environment surrounding the reticle is extremely clean. In addition, customers may take advantage of the DynamYX RS architecture by circulating air from the front to the rear of the system further preventing particles from entering the reticle chamber.

Additional features and benefits are realized with optional integrated accessories including a zero-dither theta offset axis built right into the composite reticle holder, an integrated vertical "Z" stage capable of both long-travel coarse adjustment and fine, in-process, (autofocus) adjustments, and an interferometer mirror which may be integrated directly into the reticle holder to accommodate direct position tracking along the scanning axis.

For more information, visit www.newporrt.com .

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