Planar air bearing stage from PI provides position information to 1 nm
The A-311 PIglide IS Series compact, planar air bearing stage delivers vibration-free motion for wafer inspection, laser marking, optical metrology, and other precision motion applications. Optical linear encoders provide position information to 1 nm with velocity to 1 m/s and acceleration to 1 g.
PI
Auburn, MA
www.pi-usa.us