PI linear positioning stage provides position feedback with 100 nm resolution

With speed up to 200 mm/s, the U-521 compact linear positioning stage is driven by a patented ultrasonic piezo electric motor.

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With speed up to 200 mm/s, the U-521 compact linear positioning stage is driven by a patented ultrasonic piezo electric motor, which locks the platform in place at the target position and acts like a ceramic break. An integrated optical linear encoder provides position feedback with 100 nm resolution.
PI (Physik Instrumente)
Auburn, MA

www.pi-usa.us

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