Piezosystem Jena positioning stages include an inside aperture for lightbeam guidance

The NanoX stages have one or two axes that provide sub-nanometer accuracy, based on two piezoceramics that are electrically driven in opposite directions.

Content Dam Lfw Online Articles 2016 03 Piezosystem

The NanoX stages have one or two axes that provide sub-nanometer accuracy, based on two piezoceramics that are electrically driven in opposite directions. They offer stiffness up to 1.1 N/µm for a movement of 240 µm, with high dynamics up to 700 Hz. They include an inside aperture for lightbeam guidance and integrated temperature compensation.
Piezosystem Jena
Jena, Germany

www.piezosystem.com

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