Nanopositioner from PI provides vibrationless motion
The PIHera Z flexure-guided piezo nanopositioning stage has travel ranges of 50 to 250 µm or 400 µm open-loop. Flexure-guided piezo positioning stages provide vibrationless motion. It is equipped with absolute-measuring direct-metrology capacitance sensors and provide resolution down to 0.1 nm, in a compact, FEA-optimized package for high stiffness and long lifetime.
PI (Physik Instrumente)