Vibration cancellation system from TMC Ametek controls vibration in semiconductor fabs

March 27, 2015

The Stage-Base 450 frame-mountable motion cancellation system uses a serial-type architecture with voice coil technology to provide active floor vibration cancellation starting at 0.6 Hz.

LFW Staff

Vibration cancellation system Stage-Base 450 from TMC Ametek

The Stage-Base 450 frame-mountable motion cancellation system controls building floor vibration in semiconductor facilities, while increasing wafer-processing throughput. It uses a serial-type architecture with voice coil technology to provide active floor vibration cancellation starting at 0.6 Hz, increasing to a 10-to-1 reduction by 2 Hz.
TMC Ametek
Peabody, MA
www.techmfg.com

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LFW Staff

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