A long-travel air-bearing positioning system provides a 550 ¥ 470-mm area of travel with a positioning accuracy of 0.85-µm total indicated runout per axis. The Microglide E450 uses x-y frames that ride on a 96 ¥ 70-in. granite base. Each axis is driven by two brushless sinusoidal linear servo motors controlled in parallel. Glass scale linear encoders with 100 line/mm provide feedback with a 256x external encoder multiplier, providing a system resolution of 39 nm/count.
Anorad, Hauppauge, NY