Translation stages

Dec. 1, 1997
An integrated ¥and theta stage uses air bearings to provide a noncontact system that includes patented servo feedback technology. The Z-Theta stage design eliminates mechanical guiding members, thus reducing possible pinch points. The stage comes in sizes with strokes ranging from 25 to 50 mm. The high-performance stage incorporates closed-loo¥encoder technology with resolution to 0.16 µm and z-axis positioning to ۬.5-µm accuracy and 䔮-µm repeatability at velocitie

Translation stages

An integrated ¥and theta stage uses air bearings to provide a noncontact system that includes patented servo feedback technology. The Z-Theta stage design eliminates mechanical guiding members, thus reducing possible pinch points. The stage comes in sizes with strokes ranging from 25 to 50 mm. The high-performance stage incorporates closed-loo¥encoder technology with resolution to 0.16 µm and z-axis positioning to ۬.5-µm accuracy and 䔮-µm repeatability at velocities u¥to 30 in./s and acceleration to 5 g. Theta axis resolution is 0.0007° with an accuracy of ۪.03° and velocities u¥to 41.3 rad/s.

Anorad Corp., Hauppauge, NY

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