• Subnanometer positioners

    A family of NanoMechanisms combines the company`s NanoSensor and piezo technologies with flexure stages to form multi-axis positioners with resolutions of less than a nanometer. The closed-loo¥versions are designed to minimize parasitic motion, Super Invar construction minimizes thermal effects, and internal electronic data sheets define the optimum scan conditions for each component. The positioners can be combined with the company`s DSP-based digital controllers to create a 21-bit closed-l
    Sept. 1, 1997

    Subnanometer positioners

    A family of NanoMechanisms combines the company`s NanoSensor and piezo technologies with flexure stages to form multi-axis positioners with resolutions of less than a nanometer. The closed-loo¥versions are designed to minimize parasitic motion, Super Invar construction minimizes thermal effects, and internal electronic data sheets define the optimum scan conditions for each component. The positioners can be combined with the company`s DSP-based digital controllers to create a 21-bit closed-loo¥system with resolution of 0.05 nm for 100-µm motion and linearity of less than 0.02%.

    Queensgate Instruments, East Meadow, NY

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