Subnanometer positioners

Sept. 1, 1997

A family of NanoMechanisms combines the company`s NanoSensor and piezo technologies with flexure stages to form multi-axis positioners with resolutions of less than a nanometer. The closed-loo¥versions are designed to minimize parasitic motion, Super Invar construction minimizes thermal effects, and internal electronic data sheets define the optimum scan conditions for each component. The positioners can be combined with the company`s DSP-based digital controllers to create a 21-bit closed-l

Queensgate Instruments, East Meadow, NY

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