Motion stages

Aug. 1, 1996
The PI x and x-y voice-coil scanning stages are designed for applications in which conventional screw drives are too slow and in which piezoelectric drives do not offer sufficient travel. The stages provide velocities u¥to 300 mm/s with settling times of 25 ms and a travel range of 6 mm. The drives are linear to within 0.2%. Integrated linear-variable-differential-transformer displacement sensors provide resolution to less than 1 µm. The stages are controlled by a 32-bit servo controller

Motion stages

The PI x and x-y voice-coil scanning stages are designed for applications in which conventional screw drives are too slow and in which piezoelectric drives do not offer sufficient travel. The stages provide velocities u¥to 300 mm/s with settling times of 25 ms and a travel range of 6 mm. The drives are linear to within 0.2%. Integrated linear-variable-differential-transformer displacement sensors provide resolution to less than 1 µm. The stages are controlled by a 32-bit servo controller with IEEE-488 and RS-232 and analog interfaces.

Polytec PI, Costa Mesa, CA

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