Motion stages

    Aug. 1, 1996
    The PI x and x-y voice-coil scanning stages are designed for applications in which conventional screw drives are too slow and in which piezoelectric drives do not offer sufficient travel. The stages provide velocities u¥to 300 mm/s with settling times of 25 ms and a travel range of 6 mm. The drives are linear to within 0.2%. Integrated linear-variable-differential-transformer displacement sensors provide resolution to less than 1 µm. The stages are controlled by a 32-bit servo controller

    Motion stages

    The PI x and x-y voice-coil scanning stages are designed for applications in which conventional screw drives are too slow and in which piezoelectric drives do not offer sufficient travel. The stages provide velocities u¥to 300 mm/s with settling times of 25 ms and a travel range of 6 mm. The drives are linear to within 0.2%. Integrated linear-variable-differential-transformer displacement sensors provide resolution to less than 1 µm. The stages are controlled by a 32-bit servo controller with IEEE-488 and RS-232 and analog interfaces.

    Polytec PI, Costa Mesa, CA

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