Translation stage
A closed-loop translation stage offers a range of more than 15 µm with reproducibility to within a nanometer. The NPS-X-15A measures 60 p 40 p 13.5 mm and weighs less than 300 g. The piezo-flexure design keeps parasitic motions to typically less than 5 µrad. Closed-loop operation is provided by integral capacitive sensors.
Mar 1st, 1999
Translation stage
A closed-loop translation stage offers a range of more than 15 µm with reproducibility to within a nanometer. The NPS-X-15A measures 60 p 40 p 13.5 mm and weighs less than 300 g. The piezo-flexure design keeps parasitic motions to typically less than 5 µrad. Closed-loop operation is provided by integral capacitive sensors.
Queensgate Instruments, East Meadow, NY
