Translation stage

The TSE-150H Integral Encoder Inchworm Stage features 20-nm resolution and 100-nm accuracy. The translation stage combines an Inchworm Motor, precision cross-roller bearing stage, and encoder technology in a closed-loo¥system without jitter, hysteresis, or limit cycling.

May 1st, 1998

Translation stage

The TSE-150H Integral Encoder Inchworm Stage features 20-nm resolution and 100-nm accuracy. The translation stage combines an Inchworm Motor, precision cross-roller bearing stage, and encoder technology in a closed-loo¥system without jitter, hysteresis, or limit cycling.

Burleigh Instruments, Fishers, NY

For FREE Data Circle 389

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