Translation stage
The TSE-150H Integral Encoder Inchworm Stage features 20-nm resolution and 100-nm accuracy. The translation stage combines an Inchworm Motor, precision cross-roller bearing stage, and encoder technology in a closed-loo¥system without jitter, hysteresis, or limit cycling.
May 1st, 1998
Translation stage
The TSE-150H Integral Encoder Inchworm Stage features 20-nm resolution and 100-nm accuracy. The translation stage combines an Inchworm Motor, precision cross-roller bearing stage, and encoder technology in a closed-loo¥system without jitter, hysteresis, or limit cycling.
Burleigh Instruments, Fishers, NY
For FREE Data Circle 389
