Vacuum rotary stage

A precision rotary stage made of UHV-compatible materials generates no magnetic fields nor produces heat when holding position. The UHVL-RS Rotary Stage incorporates piezoelectric technology and can convert the linear motion from one of the company`s INCHWORM motors to 䔳 rotary motion using a tangent drive to a cross-roller bearing stage. The resolution is to within 0.2 arc sec with zero backlash.

Nov 1st, 1998

Vacuum rotary stage

A precision rotary stage made of UHV-compatible materials generates no magnetic fields nor produces heat when holding position. The UHVL-RS Rotary Stage incorporates piezoelectric technology and can convert the linear motion from one of the company`s INCHWORM motors to 䔳 rotary motion using a tangent drive to a cross-roller bearing stage. The resolution is to within 0.2 arc sec with zero backlash.

Burleigh Instruments, Fishers, NY

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