• Vacuum rotary stage

    A precision rotary stage made of UHV-compatible materials generates no magnetic fields nor produces heat when holding position. The UHVL-RS Rotary Stage incorporates piezoelectric technology and can convert the linear motion from one of the company`s INCHWORM motors to 䔳 rotary motion using a tangent drive to a cross-roller bearing stage. The resolution is to within 0.2 arc sec with zero backlash.
    Nov. 1, 1998

    Vacuum rotary stage

    A precision rotary stage made of UHV-compatible materials generates no magnetic fields nor produces heat when holding position. The UHVL-RS Rotary Stage incorporates piezoelectric technology and can convert the linear motion from one of the company`s INCHWORM motors to 䔳 rotary motion using a tangent drive to a cross-roller bearing stage. The resolution is to within 0.2 arc sec with zero backlash.

    Burleigh Instruments, Fishers, NY

    Sign up for Laser Focus World Newsletters
    Get the latest news and updates.

    Related

    Case Study: Custom Microlens Arrays Design
    High-Precision Optical Design for Wide Spectrum Star Trackers | Avantier
    Hexapod 6-DOF Active Optical Alignment Micro-Robots - Enablers for Advanced Camera Manufacturing
    Sponsored
    Laser Assisted Wafer Slicing with 3DOF Motion Stages
    Sponsored

    Voice Your Opinion!

    To join the conversation, and become an exclusive member of Laser Focus World, create an account today!