PI linear motor stage achieves 2.5 µm accuracy

The V-817 linear stage has a load capacity of 600 N, travel range from 204 to 813 mm, and velocity to 3000 mm/s. An integrated linear encoder provides <1 nm resolution and the stages achieve 10 nm minimum incremental motion, 1 µm bidirectional repeatability, and 2.5 µm accuracy. The stage is 63 mm high.

PI (Physik Instrumente)

Auburn, MA

pi-usa.us

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