PI linear motor stage achieves 2.5 µm accuracy
The V-817 linear stage has a load capacity of 600 N, travel range from 204 to 813 mm, and velocity to 3000 mm/s. An integrated linear encoder provides <1 nm resolution and the stages achieve 10 nm minimum incremental motion, 1 µm bidirectional repeatability, and 2.5 µm accuracy. The stage is 63 mm high.
PI (Physik Instrumente)
Auburn, MA