Jenoptik invests in e-beam lithography tool to strengthen micro-optics capabilities

Nov. 19, 2020
Jenoptik uses e-beam lithography as a major enabler for the manufacturing of ultraprecise micro-optics.

Jenoptik (Jena, Germany) has invested in a new electron-beam (e-beam) lithography tool, which will go into operation at its Dresden, Germany site in mid-2022. The e-beam system, which will be built by e-beam technology specialist Vistec Electron Beam (also in Jena), will be a core element for the development and production of next-generation precision sensors, which are essential for the further development of deep-UV (DUV) and establishing high-precision extreme-UV (EUV) wafer exposure in semiconductor production processes.

This e-beam lithography tool writes structures to precision in the 10 nm range on substrates up to 300 mm. Jenoptik uses this technology as a major enabler for the manufacturing of ultraprecise micro-optics, which is the functional core of the company’s sensors. The improved precision and flexibility of the new e-beam lithography tool ensures that future stages in semiconductor exposure technology can be supported with the required sensors.

With the recent acquisition of TRIOPTICS, Jenoptik has continued to strengthen its optical competence, particularly in optical test and measurement technology. The company is committed to the development and introduction of advanced lithography technologies in semiconductor manufacturing, with more than 150 years of expertise in optics, sensor technology, and precision mechanics.

For more information, please visit jenoptik.com.

Source: Jenoptik press release  November 17, 2020

About the Author

LFW Staff

Published since 1965, Laser Focus World—a brand and magazine for engineers, researchers, scientists, and technical professionals—provides comprehensive global coverage of optoelectronic technologies, applications, and markets. With 80,000+ qualified print subscribers in print and over a half-million annual visitors to our online content, we are the go-to source to access decision makers and stay in-the-know.

Sponsored Recommendations

Melles Griot® XPLAN™ CCG Lens Series

March 19, 2024
IDEX Health & Science sets a new standard with our Melles Griot® XPLAN™ CCG Lens Series fluorescence microscope imaging systems. Access superior-quality optics with off-the-shelf...

Spatial Biology

March 19, 2024
Spatial Biology refers to the field that integrates spatial information into biological research, allowing for the study of biological systems in their native spatial context....

Custom-Engineered Optical Solutions for Your Application

March 19, 2024
We combine advanced optical design and manufacturing technology, with decades of experience in critical applications, to take you from first designs to ongoing marketplace success...

Semrock Optical Filters Resources

March 19, 2024
Looking for more information about Semrock optical filters? Explore sets by fluorophore, download the 2023 Semrock catalog and more.

Voice your opinion!

To join the conversation, and become an exclusive member of Laser Focus World, create an account today!