Micro Photonics to market scanning probe microscopy instrument

April 11, 2007
April 11, 2007, Irvine, CA--Micro Photonics will begin marketing the new SPM ProberStation 150, which combines three dimensional inspection and modern optical microscopy in a vision inspection system, for fast, highly repeatable atomic force microscopy (AFM) and scanning probe microscopy (SPM) studies.

April 11, 2007, Irvine, CA--Micro Photonics will begin marketing the new SPM ProberStation 150, which combines three dimensional inspection and modern optical microscopy in a vision inspection system, for fast, highly repeatable atomic force microscopy (AFM) and scanning probe microscopy (SPM) studies.

"The SPM ProberStation 150 rounds out our portfolio of AFM and SPM products," said Pierre Leroux, General Manager Surface Test Division, "With the addition of the ProberStation 150 we can now cater to virtually every kind of AFM and SPM need, from small scanners that can be retrofitted to existing microscopes in OEM applications, to a complete SPM platform with capabilities to scan large surfaces like those in silicon wafer industries."

Built on a granite stage specifically optimized for maximum stability, the SPM ProberStation 150 virtually eliminates undesired movement in the Z direction during large movements in the lateral plane, and maintains maximum stability during nanometer movements in lateral (X-Y) and vertical (Z) directions. Also SPM ProberStation 150 users won't have to sacrifice speed or repeatability when studying large samples. The large travel area of the motorized stage accommodates samples up to 150 mm x 250 mm, and measurements are highly repeatable ± 200 nm and ultra fast.

Functions include: mapping of the lateral plane, which can be programmed using a PC, and automatic shifting between inspection operations using a standard joystick controller. The integrated optical microscope, equipped with Normaski (DIC) is standard and equipped with a manual zoom function and manual adjustment of the focal plane, optional automatic functions are available. Options include: an image processing module with automatic pattern recognition for analyzing predefined features/areas; as well as programming coordinates which can be used to quickly analyze a series of features at defined locations.

For more information, visit Micro Photonics.

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