EV Group's automated UV nanoimprint litho system for photonics, LEDs and BioMEMS

The EVG 720 automated UV nanoimprint lithography system provides full-field lithography with an integrated soft stamp/template fabrication capability.

Jan. 31, 2014

The EVG 720 automated UV nanoimprint lithography (UV-NIL) system provides full-field lithography with an integrated soft stamp/template fabrication capability. Designed for photonics, LED, and BioMEMS production, it can print nanostructures as small as 40 nm in diameter over a large area in volume throughputs of >60 wafers/hr.
EV Group
St. Florian, Austria
www.evgroup.com

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