Optics

Piezoelectric xy stages

Feb. 1, 1995

The P730 and P731 monolithic flexure stages are piezoelectrically driven with 50 50 and 100 100?m motion ranges, respectively. The resonant frequency of 400 H¥allows fast scanning for nearfield scanning microscopy. Basic models are offered in aluminum. Stainlesssteel and Invar versions are available.

Function generator

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Yaw and pitch series stages have use in laser processing applications

Direct-drive rotation stages provide position accuracy of 10 µrad

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