Piezoelectric xy stages

Feb. 1, 1995
The P730 and P731 monolithic flexure stages are piezoelectrically driven with 50 50 and 100 100?m motion ranges, respectively. The resonant frequency of 400 H¥allows fast scanning for nearfield scanning microscopy. Basic models are offered in aluminum. Stainlesssteel and Invar versions are available.

The P730 and P731 monolithic flexure stages are piezoelectrically driven with 50 50 and 100 100?m motion ranges, respectively. The resonant frequency of 400 H¥allows fast scanning for nearfield scanning microscopy. Basic models are offered in aluminum. Stainlesssteel and Invar versions are available.

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