Fast cryogenic vacuum pump

Nov. 1, 1994
The 500mm KelVac 501ZH¥cryogenic vacuum pum¥is suited for large sputtering applications because it can cool down to 20 K in 85 min when driven by the KelCool 130 cryocooler, which provides 115 W of power at 77 K and 15 W at 20 K. The argongas capacity is 12,500 l, and the argon throughput is 30mbar l/s. The pum¥has a short regeneration period to increase uptime during hightemperature optical coating and other applications.

The 500mm KelVac 501ZH¥cryogenic vacuum pum¥is suited for large sputtering applications because it can cool down to 20 K in 85 min when driven by the KelCool 130 cryocooler, which provides 115 W of power at 77 K and 15 W at 20 K. The argongas capacity is 12,500 l, and the argon throughput is 30mbar l/s. The pum¥has a short regeneration period to increase uptime during hightemperature optical coating and other applications.

Laser interferometer

Sponsored Recommendations

Request a quote: Micro 3D Printed Part or microArch micro-precision 3D printers

April 11, 2024
See the results for yourself! We'll print a benchmark part so that you can assess our quality. Just send us your file and we'll get to work.

Request a free Micro 3D Printed sample part

April 11, 2024
The best way to understand the part quality we can achieve is by seeing it first-hand. Request a free 3D printed high-precision sample part.

How to Tune Servo Systems: The Basics

April 10, 2024
Learn how to tune a servo system using frequency-based tools to meet system specifications by watching our webinar!

Precision Motion Control for Sample Manipulation in Ultra-High Resolution Tomography

April 10, 2024
Learn the critical items that designers and engineers must consider when attempting to achieve reliable ultra-high resolution tomography results here!

Voice your opinion!

To join the conversation, and become an exclusive member of Laser Focus World, create an account today!