Fast cryogenic vacuum pump

    Nov. 1, 1994
    The 500mm KelVac 501ZH¥cryogenic vacuum pum¥is suited for large sputtering applications because it can cool down to 20 K in 85 min when driven by the KelCool 130 cryocooler, which provides 115 W of power at 77 K and 15 W at 20 K. The argongas capacity is 12,500 l, and the argon throughput is 30mbar l/s. The pum¥has a short regeneration period to increase uptime during hightemperature optical coating and other applications.

    The 500mm KelVac 501ZH¥cryogenic vacuum pum¥is suited for large sputtering applications because it can cool down to 20 K in 85 min when driven by the KelCool 130 cryocooler, which provides 115 W of power at 77 K and 15 W at 20 K. The argongas capacity is 12,500 l, and the argon throughput is 30mbar l/s. The pum¥has a short regeneration period to increase uptime during hightemperature optical coating and other applications.

    Laser interferometer

    Continue Reading

    Sponsored Recommendations

    March 31, 2025
    Enhance your remote sensing capabilities with Chroma's precision-engineered optical filters, designed for applications such as environmental monitoring, geospatial mapping, and...
    March 31, 2025
    Designed for compatibility with a wide range of systems, Chroma's UV filters are engineered to feature high transmission, superior out-of-band blocking, steep edge transitions...
    March 31, 2025
    Discover strategies to balance component performance and system design, reducing development time and costs while maximizing efficiency.
    March 31, 2025
    Filter accessories including cubes, sliders, and rings, designed to enhance the performance and versatility of optical systems. These components ensure precise alignment and stability...

    Voice your opinion!

    To join the conversation, and become an exclusive member of Laser Focus World, create an account today!