Fast cryogenic vacuum pump

The 500mm KelVac 501ZH¥cryogenic vacuum pum¥is suited for large sputtering applications because it can cool down to 20 K in 85 min when driven by the KelCool 130 cryocooler, which provides 115 W of power at 77 K and 15 W at 20 K. The argongas capacity is 12,500 l, and the argon throughput is 30mbar l/s. The pum¥has a short regeneration period to increase uptime during hightemperature optical coating and other applications.

The 500mm KelVac 501ZH¥cryogenic vacuum pum¥is suited for large sputtering applications because it can cool down to 20 K in 85 min when driven by the KelCool 130 cryocooler, which provides 115 W of power at 77 K and 15 W at 20 K. The argongas capacity is 12,500 l, and the argon throughput is 30mbar l/s. The pum¥has a short regeneration period to increase uptime during hightemperature optical coating and other applications.

Laser interferometer

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