Thin-film head lithography
The Model 1800 lithography tool is designed for manufacturers of thin-film heads in disk drives. The device provides first-order alignment to the magneto-resistive lead layer while maintaining resolution and throughput requirements for advanced thin-film-head rowbar production. The machine features a 28 ¥ 2.0-mm field size with 0.8-µm resolution capabilities.
Ultratech Stepper, San Jose, CA