Oxygen purifiers

Dec. 1, 1997
The GateKeeper oxygen-purifier series removes contaminants such as water, carbon dioxide, carbon monoxide, and nonmethane hydrocarbons to levels of less than a part per billion. Pure oxygen is needed in CVD processes for oxidation of silicon source compounds and in thermal oxide growth. The gas purifier does not need to be heated and does not contain organics that can outgas. The purifiers are available in a range of sizes and have integrated 0.3-µm filters.

Oxygen purifiers

The GateKeeper oxygen-purifier series removes contaminants such as water, carbon dioxide, carbon monoxide, and nonmethane hydrocarbons to levels of less than a part per billion. Pure oxygen is needed in CVD processes for oxidation of silicon source compounds and in thermal oxide growth. The gas purifier does not need to be heated and does not contain organics that can outgas. The purifiers are available in a range of sizes and have integrated 0.3-µm filters.

Aeronex, San Diego, CA

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