Ellipsometer

The CER Ellipsometer SE 500 combines single-wavelength ellipsometry and normal-incidence reflection spectroscopy to measure thin films. This technique overcomes the ambiguity in film thickness that can occur using only single-wavelength ellipsometry. The instrument records both a reflection spectrum and the ellipsometric angles of a spot under test, which allows the refractive index and film thickness to be calculated. The system can be used with a fully automatic wafer-handling system for fast
Sept. 1, 1997

Ellipsometer

The CER Ellipsometer SE 500 combines single-wavelength ellipsometry and normal-incidence reflection spectroscopy to measure thin films. This technique overcomes the ambiguity in film thickness that can occur using only single-wavelength ellipsometry. The instrument records both a reflection spectrum and the ellipsometric angles of a spot under test, which allows the refractive index and film thickness to be calculated. The system can be used with a fully automatic wafer-handling system for fast wafer mapping.

Sentech Instruments GmbH, Berlin, Germany

Sign up for Laser Focus World Newsletters
Get the latest news and updates.

Related

Universal Photonics optics polishing machines: Booth #1948 & 1949
Expanding opportunities for PICs
Developing a Partnership with IDEX Health & Science
Sponsored
Electrostatic discharge (ESD) resin now available on BMF 3D printers
Sponsored

Voice Your Opinion!

To join the conversation, and become an exclusive member of Laser Focus World, create an account today!