• Ellipsometer

    The CER Ellipsometer SE 500 combines single-wavelength ellipsometry and normal-incidence reflection spectroscopy to measure thin films. This technique overcomes the ambiguity in film thickness that can occur using only single-wavelength ellipsometry. The instrument records both a reflection spectrum and the ellipsometric angles of a spot under test, which allows the refractive index and film thickness to be calculated. The system can be used with a fully automatic wafer-handling system for fast
    Sept. 1, 1997

    Ellipsometer

    The CER Ellipsometer SE 500 combines single-wavelength ellipsometry and normal-incidence reflection spectroscopy to measure thin films. This technique overcomes the ambiguity in film thickness that can occur using only single-wavelength ellipsometry. The instrument records both a reflection spectrum and the ellipsometric angles of a spot under test, which allows the refractive index and film thickness to be calculated. The system can be used with a fully automatic wafer-handling system for fast wafer mapping.

    Sentech Instruments GmbH, Berlin, Germany

    Sign up for Laser Focus World Newsletters
    Get the latest news and updates.

    Related

    Case Study: Custom Microlens Arrays Design
    Photonics Hot List: June 13, 2025

    Voice Your Opinion!

    To join the conversation, and become an exclusive member of Laser Focus World, create an account today!