JPSA introduces excimer laser micromachining system

Aug. 18, 2004
Hollis, New Hampshire, August 18, 2004--J P Sercel Associates' new IX-1100 Excimer Laser Micromachining System is a compact, Class 1 excimer laser workstation designed for high throughput, production micro-machining. Designed and ruggedly constructed for industrial use, this precise UV laser system is built to perform with minimal downtime and maximum flexibility.

Hollis, New Hampshire, August 18, 2004--J P Sercel Associates' new IX-1100 Excimer Laser Micromachining System is a compact, Class 1 excimer laser workstation designed for high throughput, production micro-machining. Designed and ruggedly constructed for industrial use, this precise UV laser system is built to perform with minimal downtime and maximum flexibility. Based on the highly successful IX-1000, it features high-precision air bearing stages, a lower and more ergonomic structure, advanced excimer lasers with soft pre-ionization, integrated COMO (Coordinated Opposing Motion) mask indexing air bearing stages, new beam homogenizers and imaging lenses, and many other new features.

Complex shapes and patterns can be machined across a wide range of materials, due to the unique characteristics of its powerful excimer laser beam, beam delivery system (BDS), and range of working UV wavelengths - down to 157nm. Beam homogenization and near-field imaging allow multiple simultaneous micro-machining processes for optimum yields. Its high pulse repetition rate ensures rapid processing, and its precision motion and positioning components ensure repeatability and exceptional quality. The IX-1100 incorporates a totally integrated design in only 4 feet x 8 feet of floor space. This system provides multi-axis motion control with sub-micron resolution stages and integrated laser control.

The IX-1100 is also equipped with JPSA's new CAD conversion software, a powerful tool that gives the user the ability to quickly and easily read Autocad, dwg and dwx files - all the way up to Autocad version 2005 - and generate macro processes and programs to perform direct write functions. The software utility will process lines, arcs, circles, points, and polylines, and produce direct writing on a variety of substrates directly from the CAD file information.

The IX-1100 system includes PC-controlled power meters and beam profilometer, an Automatic Door Class 1 system, industrial-grade reliability with R&D flexibility, and the system is controlled via JPSA's user-friendly SystemControls32, Windows 2000-based software.

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