Cymer light source upgrade is redesigned with novel materials and coatings
July 26, 2017
An upgrade with enhanced chamber and optics technology to argon fluoride light sources extends the time between service events by a third. The chamber was redesigned with novel materials and coatings, and high-purity materials are applied to supporting optics to extend the service interval to 40 billion pulses.
Cymer
San Diego, CA
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