Hamamatsu to acquire UV light-source maker Energetiq Technology

The agreement will bring Energetiq into the consolidated group of companies that are owned by Photonics Management Corp., a subsidiary of Hamamatsu.

Hamamatsu Photonics (Hamamatsu, Japan) is acquiring Energetiq Technology (Woburn, MA), a manufacturer of Laser Driven Light Sources (LDLS) and extreme ultraviolet (EUV) light sources, for $42 million. The agreement, when complete, will bring Energetiq into the consolidated group of companies that are owned by Photonics Management Corp. (PMC; Bridgewater, NJ), which is a subsidiary of Hamamatsu Photonics.

There has been a growing demand for light sources with high brightness in the ultraviolet (UV) region. With high brightness sources, semiconductor wafers can be quickly and more accurately inspected for properties such as thickness and pattern accuracy. As thinner design rules for semiconductors are implemented, there will be a significant demand for ultra-short wavelength EUV light sources for inspection and metrology in support of EUV photolithography. Energetiq's LDLS products and EUV light sources have the required brightness for these applications.

The acquision of Energetiq fits with Hamamatsu's long history of developing and marketing light sources such as the xenon lamps and mercury xenon lamps for semiconductor inspection. Hamamatsu plans to combine the technologies of both companies to speed development of new, value-added products for diverse applications, including environmental analysis.

Source: Hamamatsu Photonics

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