Jenoptik & Lambda Physik Receive Funding for Nanotechnology Joint Venture

April 15, 2002
Jena/Gottingen, Germany, April 15, 2002 -- The research and development activities of the Jenoptik AG and Lambda Physik AG joint venture, XTREME technologies GmbH, will be funded by the German Federal Ministry of Education and Research (BMBF). The purpose of this strategic research partnership is to develop light sources in the extreme ultraviolet range (EUV) for future production of even more efficient chip generations

Jena/Gottingen, Germany, April 15, 2002 -- The research and development activities of the Jenoptik AG and Lambda Physik AG joint venture, XTREME technologies GmbH, will be funded by the German Federal Ministry of Education and Research (BMBF). The purpose of this strategic research partnership is to develop light sources in the extreme ultraviolet range (EUV) for future production of even more efficient chip generations.

The German Federal Ministry of Education and Research (BMBF) has approved the funding for the joint project to research the basic principles of EUV lithography and to develop EUV light sources and the corresponding metrology. XTREME technologies, of which Jenoptik and Lambda Physik each hold a 50 percent share, will coordinate the European consortium for the development of EUV beam sources. The development of EUV beam sources is part of the European consortium MEDEA+, whose members includes industrial partners such as Alcatel, Carl Zeiss, Philips, ASML, Schott and Infineon as well as European universities and research institutes for research into EUV lithography.

Jenoptik and Lambda Physik will invest more than 10 million euros in XTREME technologies during the first stage of the development project (until 2004). EUV light sources for the next generation and beyond of optical microlithography are being developed at the Jena and Gottingen locations. Starting in 2007, EUV technology is expected to enable feature sizes of less than 50 nanometers, which will lead to significantly faster and more efficient microchips.

Jenoptik AG is a globally active technology group based in Jena, Germany, with concentrations in three high-growth company divisions, Clean Systems Technologies, Photonics Technologies and Asset Management. The company grew out of Jenoptik Carl Zeiss Jena GmbH in 1991.

For more information, visit www.jenoptik.com

Lambda Physik is one of the pioneers and world leaders in the development and production of pulsed UV lasers such as excimer lasers, diode-pumped solid-state lasers, and dye lasers. Founded in 1971, the company is the sole or leading supplier in growth markets for applications in industry, science, and medicine and has become a major supplier in the area of microlithography. The group has subsidiaries in the USA, Japan and Germany.

For more information, visit www.lambdaphysik.com

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