Multiaxis actuators

    April 1, 1995
    PZT actuator by Physik Instrumente, Waldbronn, Germany, is based on the d15 shear piezo effect. Motion u¥to 10 ¥ 10 ¥ 10 µm in x, y, and ¥is possible in an envelope of less than 1 in3. Such motion is obtained by a combination of d33 poled ceramics for ¥axis, and d15 for shear, x, y motion. Small size and mass allows for submillisecond response.

    PZT actuator by Physik Instrumente, Waldbronn, Germany, is based on the d15 shear piezo effect. Motion u¥to 10 ¥ 10 ¥ 10 µm in x, y, and ¥is possible in an envelope of less than 1 in3. Such motion is obtained by a combination of d33 poled ceramics for ¥axis, and d15 for shear, x, y motion. Small size and mass allows for submillisecond response.

    DPSS Q-switch

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