Excimer halogen generator

HaloSafe halogen generator, enclosed within the excimer laser housing, eliminates hazardous cylinders of compressed gas, such as F2 or HCl, by producing the gases on site on demand. Completely sealed, the integrated generator is controlled by the laser microprocessor, which signals the need for a complete recharge. An option provides periodic gas injections to extend fill lifetime. Sufficient reactants are stored for several months or even years of operation, depending on gas type. The device c

Oct 1st, 1995

Excimer halogen generator

HaloSafe halogen generator, enclosed within the excimer laser housing, eliminates hazardous cylinders of compressed gas, such as F2 or HCl, by producing the gases on site on demand. Completely sealed, the integrated generator is controlled by the laser microprocessor, which signals the need for a complete recharge. An option provides periodic gas injections to extend fill lifetime. Sufficient reactants are stored for several months or even years of operation, depending on gas type. The device can be retrofited into previously produced lasers.

Lambda Physik, Acton, MA

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