Small excimer laser

The Model 5300 HCl excimer laser provides multimode 308-nm pulses at more than 667 mJ/pulse. Pulse durations last from 40 to 50 ns FWHM, and the repetition rate can be varied from 1 to 300 Hz. Beam size is 2.5 ¥ 3.3 cm. A variety of micromachining applications can use this laser, which has a footprint of 107 ¥ 188 cm2.
Sept. 1, 1995

Small excimer laser

The Model 5300 HCl excimer laser provides multimode 308-nm pulses at more than 667 mJ/pulse. Pulse durations last from 40 to 50 ns FWHM, and the repetition rate can be varied from 1 to 300 Hz. Beam size is 2.5 ¥ 3.3 cm. A variety of micromachining applications can use this laser, which has a footprint of 107 ¥ 188 cm2.

XMR, Santa Clara, CA

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