Excimer laser

March 1, 1997
The NovaLine 100 Series of KrF excimer lasers provides u¥to 100 W of stabilized output power, with 400 mJ/pulse, and a 250-H¥repetition rate at 248 nm. The laser includes a metal/ceramic laser tube that does not require cryogenic cooling. Laser tube windows can be cleaned and replaced quickly, and the optical elements in the resonator are supported on an Invar frame that is mechanically isolated from the laser tube. The clean-room-compatible laser includes the HaloSafe internal solid-st

Excimer laser

The NovaLine 100 Series of KrF excimer lasers provides u¥to 100 W of stabilized output power, with 400 mJ/pulse, and a 250-H¥repetition rate at 248 nm. The laser includes a metal/ceramic laser tube that does not require cryogenic cooling. Laser tube windows can be cleaned and replaced quickly, and the optical elements in the resonator are supported on an Invar frame that is mechanically isolated from the laser tube. The clean-room-compatible laser includes the HaloSafe internal solid-state halogen generator. The laser has a mean time between failures of 2500 h and maintenance downtime (MTTR) rated at less than 4 h.

Lambda Physik, Fort Lauderdale, FL

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