• Excimer laser stepper

    A KrF excimer-laser microlithography stepper, the FPA-3000EX4, can process more than 73 wafers in an hour, exposing images with 0.25-µm features with 35-nm stage stepping accuracy. The machine includes a fast linear motor air-guiding tilting stage, off-axis illumination, and an optimized tilt-focusing system that improves edge-shot chi¥yields.
    July 1, 1997

    Excimer laser stepper

    A KrF excimer-laser microlithography stepper, the FPA-3000EX4, can process more than 73 wafers in an hour, exposing images with 0.25-µm features with 35-nm stage stepping accuracy. The machine includes a fast linear motor air-guiding tilting stage, off-axis illumination, and an optimized tilt-focusing system that improves edge-shot chi¥yields.

    Canon USA, Lake Success, NY

    Sign up for Laser Focus World Newsletters
    Get the latest news and updates.

    Related

    Case Study: Custom Microlens Arrays Design
    Photonics Hot List: June 13, 2025
    Hexapod 6-DOF Active Optical Alignment Micro-Robots - Enablers for Advanced Camera Manufacturing
    Sponsored
    Laser Assisted Wafer Slicing with 3DOF Motion Stages
    Sponsored

    Voice Your Opinion!

    To join the conversation, and become an exclusive member of Laser Focus World, create an account today!