Lambda Physik introduces 0.6-pm-linewidth excimer-laser source

Dec. 1, 1997
An excimer laser with an emission linewidth of 0.6 pm (full width at half maximum) was to be introduced by Lambda Physik (Göttingen, Germany) at Semicon Japan (Dec. 3-5; Makuhari, Japan). The company claims its NovaLine LITHO/S is the narrowest-spectral-linewidth 248-nm excimer-laser source available and notes that linewidth is an especially important parameter for microlithography applications.

Lambda Physik introduces 0.6-pm-linewidth excimer-laser source

An excimer laser with an emission linewidth of 0.6 pm (full width at half maximum) was to be introduced by Lambda Physik (Göttingen, Germany) at Semicon Japan (Dec. 3-5; Makuhari, Japan). The company claims its NovaLine LITHO/S is the narrowest-spectral-linewidth 248-nm excimer-laser source available and notes that linewidth is an especially important parameter for microlithography applications.

A narrow linewidth greatly reduces chromatic aberrations in a projection lens, allowing circuit feature sizes as small as 0.18 µm to be achieved. Chromatic aberrations are very difficult to correct in such lenses because of the limited number of materials that transmit at deep-ultraviolet wavelengths. A key factor in achieving the 0.6-pm linewidth is the use of a proprietary polarization-coupled resonator design. The design, which improves both spectral purity and laser-operating efficiency, is the product of a joint development effort between Matsushita Research Institute of Technology (Tokyo, Japan) and Lambda Physik.

Sponsored Recommendations

March 31, 2025
Enhance your remote sensing capabilities with Chroma's precision-engineered optical filters, designed for applications such as environmental monitoring, geospatial mapping, and...
March 31, 2025
Designed for compatibility with a wide range of systems, Chroma's UV filters are engineered to feature high transmission, superior out-of-band blocking, steep edge transitions...
March 31, 2025
Discover strategies to balance component performance and system design, reducing development time and costs while maximizing efficiency.
March 31, 2025
Filter accessories including cubes, sliders, and rings, designed to enhance the performance and versatility of optical systems. These components ensure precise alignment and stability...

Voice your opinion!

To join the conversation, and become an exclusive member of Laser Focus World, create an account today!