Lambda Physik introduces 0.6-pm-linewidth excimer-laser source

Dec. 1, 1997
An excimer laser with an emission linewidth of 0.6 pm (full width at half maximum) was to be introduced by Lambda Physik (Göttingen, Germany) at Semicon Japan (Dec. 3-5; Makuhari, Japan). The company claims its NovaLine LITHO/S is the narrowest-spectral-linewidth 248-nm excimer-laser source available and notes that linewidth is an especially important parameter for microlithography applications.

Lambda Physik introduces 0.6-pm-linewidth excimer-laser source

An excimer laser with an emission linewidth of 0.6 pm (full width at half maximum) was to be introduced by Lambda Physik (Göttingen, Germany) at Semicon Japan (Dec. 3-5; Makuhari, Japan). The company claims its NovaLine LITHO/S is the narrowest-spectral-linewidth 248-nm excimer-laser source available and notes that linewidth is an especially important parameter for microlithography applications.

A narrow linewidth greatly reduces chromatic aberrations in a projection lens, allowing circuit feature sizes as small as 0.18 µm to be achieved. Chromatic aberrations are very difficult to correct in such lenses because of the limited number of materials that transmit at deep-ultraviolet wavelengths. A key factor in achieving the 0.6-pm linewidth is the use of a proprietary polarization-coupled resonator design. The design, which improves both spectral purity and laser-operating efficiency, is the product of a joint development effort between Matsushita Research Institute of Technology (Tokyo, Japan) and Lambda Physik.

Sponsored Recommendations

Achromatic Lenses: High-Quality Custom Optics

March 13, 2025
Ensure clarity and accuracy in your optics systems with Lacroix’s achromatic lenses. Explore how our custom solutions minimize chromatic aberration for perfect results.

Manufacturing Considerations for Tolerancing Aspheres

March 13, 2025
Understand the critical factors in manufacturing aspheres and how Lacroix Optics ensures precise tolerancing in every optical component.

Explore Our Videos: Insights into Precision Optics

March 13, 2025
Get an inside look at Lacroix Optics with our collection of informative videos showcasing our capabilities, innovations, and processes.

Optical Assemblies: Reliable and Precise Solutions

March 13, 2025
Ensure your optical system works seamlessly with Lacroix Optics' custom optical assemblies. Discover the precision and reliability we bring to every project.

Voice your opinion!

To join the conversation, and become an exclusive member of Laser Focus World, create an account today!