Excimer laser

The NovaLine A1000 excimer laser is a 193-nm-emitting argon fluoride laser intended for deep-UV microlithography. The line-narrowed model A1010 produces 5 W at 1-kH¥repetition rate, with a spectral bandwidth of less than 0.6-pm FWHM. This allows the laser to generate circuit features smaller than 0.18 µm.
Oct. 1, 1998

Excimer laser

The NovaLine A1000 excimer laser is a 193-nm-emitting argon fluoride laser intended for deep-UV microlithography. The line-narrowed model A1010 produces 5 W at 1-kH¥repetition rate, with a spectral bandwidth of less than 0.6-pm FWHM. This allows the laser to generate circuit features smaller than 0.18 µm.

Lambda Physik, Fort Lauderdale, FL

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