Beam attenuators

Beam attenuators are available for 193-nm ArF and 248-nm KrF excimer lasers. The attenuators are multilayer dielectric-coated fused-silica optics that allow a variation in the amount of the transmitted energy by controlling the beam`s angle of incidence. The 193-nm attenuator can change the output power from about 20% to 85% transmission. The 248-nm attenuator can vary the output power from about 10% to 90%.

Beam attenuators

Beam attenuators are available for 193-nm ArF and 248-nm KrF excimer lasers. The attenuators are multilayer dielectric-coated fused-silica optics that allow a variation in the amount of the transmitted energy by controlling the beam`s angle of incidence. The 193-nm attenuator can change the output power from about 20% to 85% transmission. The 248-nm attenuator can vary the output power from about 10% to 90%.

Acton Research Corp., Acton, MA

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