Coherent introduces IndyStar 2 kHz excimer laser

April 7, 2010
Coherent Inc.  has added a new model to its IndyStar family of compact excimer lasers that offers higher repetition rate (2 kHz) for increased throughput.

Coherent Inc. has added a new model to its IndyStar family of compact excimer lasers that offers higher repetition rate (2 kHz) for increased throughput.

In addition, the fully Semi S2-certified IndyStar 2 kHz laser incorporates several new output stabilization features for improved processing, making them good for use in semiconductor fabrication, testing, inspection and micromaterials processing facilities. The new IndyStar 2 kHz is offered with a choice of 193 nm (ArF) output where it delivers 8 W of stabilized power or 248 nm (KrF) output with 12 W of stabilized power.

The new IndyStar uses an advanced electronics platform enabling two new stabilization features called POWERLOK and TIMELOK. The POWERLOK feature ensures constant pulse energy of each single laser pulse, actively stabilized particularly for applications using bursts of pulses or specific pulse trains. TIMELOK provides superior trigger-to-pulse delay stability, supporting tight synchronization with other equipment.

Sponsored Recommendations

March 31, 2025
Enhance your remote sensing capabilities with Chroma's precision-engineered optical filters, designed for applications such as environmental monitoring, geospatial mapping, and...
March 31, 2025
Designed for compatibility with a wide range of systems, Chroma's UV filters are engineered to feature high transmission, superior out-of-band blocking, steep edge transitions...
March 31, 2025
Discover strategies to balance component performance and system design, reducing development time and costs while maximizing efficiency.
March 31, 2025
Filter accessories including cubes, sliders, and rings, designed to enhance the performance and versatility of optical systems. These components ensure precise alignment and stability...

Voice your opinion!

To join the conversation, and become an exclusive member of Laser Focus World, create an account today!