Next Scan Technology makes concept launch of LSE 170 Mark 1 scanner system

June 14, 2011
Next Scan Technology, Silvolde, The Netherlands, has made a concept launch of F-Omega, its patented large field optics and its first derivative: the LSE170 'Mark I', full telecentric, high speed scanner system.

Next Scan Technology, Silvolde, The Netherlands, has made a concept launch of F-Omega, its patented large field optics and its first derivative: the LSE170 'Mark I', full telecentric, high speed scanner system. This high speed line scan engine features the unique F-Omega scanning system. The Polygon scanner provides 100 to 400 line scans per second.

The system has unique telecentric (scan beam always perpendicular to object surface) F-theta optics. It has high substrate scan speeds of 25 to 100 m/s. The system has a 170 mm scan width and is available for UV, green and NIR wavelengths. Diffraction-limited quality optics provide small focused spot sizes. The system includes control electronics for easy integration with lasers and linear stages

Wavelength can be 343/355 nm, 515/512 nm, or 1030/1064 nm, at which minimum spot (FWHM) can be 9 µm, 13 µm, or 26 µm, respectively, and minimum spot (1/e2 dia) can be 15 µm, 22 µm, and 44 µm, respectively.

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