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    1. Industrial Laser Solutions

    Piezo nanopositioning stages

    Sept. 30, 2016
    The QNP2 series XY piezo positioning stages have a 50 x 50mm clear aperture with closed-loop travels up to 100 x 100 microns (open-loop travels to 120 x 120 microns).
    Industrial Laser Solutions Editors
    Content Dam Ils Online Articles 2016 09 Aerotech Qnp2 100 100xya Web

    The QNP2 series XY piezo positioning stages from Aerotech (Pittsburgh, PA) have a 50 × 50mm clear aperture with closed-loop travels up to 100 × 100µm (open-loop travels to 120 × 120µm). The stages employ a parallel-kinematic flexure and metrology design to ensure a high level of multi-axis accuracy. A patent-pending drive design minimizes yaw errors while maintaining an Abbe-compliant metrology system, and a capacitive sensor parallel-metrology design directly measures the output of the positioning carriage to enable 0.15nm resolution, 0.01% linearity, and 1nm bidirectional repeatability.

    For more information, please visit www.aerotech.com.

    About the Author

    Industrial Laser Solutions Editors

    We edited the content of this article, which was contributed by outside sources, to fit our style and substance requirements. (Editor’s Note: Industrial Laser Solutions has folded as a brand and is now part of Laser Focus World, effective in 2022.)

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